| 摘要 |
PROBLEM TO BE SOLVED: To prevent warping of a wafer (semiconductor substrate) at manufacture of a solar battery by providing electrodes formed through baking conductive materials and residual stress relieving notches on the surface of the semiconductor substrate, with the notches being provided in a region where the electrodes do not exist. SOLUTION: A solar battery is constituted of a polycrystalline wafer 1, which works as a semiconductor substrate, front-surface electrodes 2 formed on the front surface of the wafer 1, and rear surface electrodes 3 formed on the rear surface of the wafer 1. The wafer 1 has a p-n junction which is formed by solidifying p-type silicon and forming an n+-type layer 4 on the surface of the solidified silicon. Uneveness sections 5 are formed on the surface of the n+-type layer 4 to facilitate the absorption of solar light and an antireffection film 6 is formed on the surfaces of the uneveness sections 5 for preventing the reflection of solar light. Then a p+-type layer 7 and the front surface electrodes 2 are formed on the surface of the wafer 1. Thereafter, the rear-surface electrodes 3 and residual stress relieving notches 8 are formed on the rear surface of the wafer 1. Therefore, the semiconductor substrate can be prevented from being damaged or from cracking by preventing the deterioration of the strength of the solar battery itself. |
