发明名称 ELECTROMAGNETIC ACTUATOR AND STAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To efficiently cool an armature unit and to reduce the heat transfer to the circumference from the unit by arranging a partition member for forming such a space that thermally insulates a cooling space which houses armature coils and is partially cooled from the external space. SOLUTION: An armature unit 24A is provided with an armature base 78 made of a nonmagnetic metal, resin, etc., and a hollow rectangular parallelepiped can 80 made of a nonmagnetic material and has one opened face which is fixed to the +Z direction side surface of the base 78. The closed space formed of the base 78 and can 80 is divided into a cooling space 83a and a heat insulating space 83B by a partition member 81. The surface of the member 81 on the heat insulating space 83B side is finished to a specular surface and a flat coil group 84A composed of N pieces flat coils 84A1,..., 84AN and another flat coil group 84B also composed of N pieces of flat coils are arranged in the cooling space 83A, with the group 84B being arranged in the +Y direction of the group 84a. Therefore, the heat generated from the armature coils can be removed and isolated effectively, because the heat is removed in the cooling space 83a and the internal space is thermally isolated from the external space by the heat insulating space.
申请公布号 JP2000114034(A) 申请公布日期 2000.04.21
申请号 JP19980281865 申请日期 1998.10.05
申请人 NIKON CORP 发明人 KIKUCHI TOSHIHIDE;OYAMAGUCHI MAKIKO
分类号 H01F7/06;G03F7/20;H02K41/02;(IPC1-7):H01F7/06 主分类号 H01F7/06
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