发明名称 METHOD FOR MOUNTING SEMICONDUCTOR ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To positively confirm filled state by surely filling the space between a wiring substrate and a semiconductor element with a bonding agent. SOLUTION: A wiring substrate 1 and a semiconductor element 4 are jointed via electrodes 3 and 5, and the semiconductor element is mounted on the wiring substrate 1. A hole 7 is opened on the wiring substrate 1, a bonding agent 8 is injected into a space 6, where it is formed between the wiring substrate 1 and the semiconductor element 4, its periphery is opened through a hole 7, and the injected bonding agent 8 is makes tight contact with the surface facing the wiring substrate 1 of the semiconductor element 4, and it is entirely replaced with the air in the space 6. The bonding agent 8 flows on the rear surface of the semiconductor element 4 to run over its periphery. By confirming flow out of it, for confirming perfect fulfillment of the bonding agent is confirmed.</p>
申请公布号 JP2000114290(A) 申请公布日期 2000.04.21
申请号 JP19980285256 申请日期 1998.10.07
申请人 MITSUBISHI HEAVY IND LTD 发明人 SODEKAWA MANABU
分类号 H01L21/60;H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/60
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