| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device which equipped with a member for connecting a safety band. SOLUTION: A substrate processing device 1 comprises a safety band hook connection member 50 (50A-50L) at its upper part. At high-altitude work for maintenance, a safety band hook of the safety band is connected to the safety band hook connection member 50 to secure safety while working. The safety band hook is held by a holding member, provided at the upper part of a transport robot to raise the transport robot, so that the safety band hook is connected to the safety band hook connection member 50. Thus, safety of workers is assured, even while the worker reader a high-raised place. |
