发明名称 XY TABLE DEVICE WITH ROTARY POSITIONING FUNCTION AROUND VERTICAL AXIS
摘要 PROBLEM TO BE SOLVED: To simultaneously carry out positioning of a work such as a printed- circuit board in an X-axis direction and a Y-axis direction orthogonal thereto, and in a rotary direction around a vertical axis. SOLUTION: In an XY table device, a movable table plate 3 where a printed- circuit board 25 is placed is placed on the upper surface of a base plate 1 so that it can freely travel in a horizontal direction, and the movable table plate 13 is reciprocated in an X-axis direction and a Y-axis direction orthogonally crossing the X-axis direction, and at the same time is rotated around a vertical axial line by the rotary direct of three operation members 6, 7, and 13 being provided on the base plate 1.
申请公布号 JP2000114795(A) 申请公布日期 2000.04.21
申请号 JP19980280737 申请日期 1998.10.02
申请人 ROHM CO LTD 发明人 MIWA TADATOSHI;NIWA HIROSHI
分类号 B23Q1/00;B23Q1/25;B23Q1/44;H01L21/68;H05K13/04 主分类号 B23Q1/00
代理机构 代理人
主权项
地址