| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to automatically position an object to be visually checked and to prevent visual check by inspectors from being slowed down, by combining a software program flow with a control step. SOLUTION: A wafer a2 to be visually checked is taken out of a wafer case a1, picked up (a3), aligned (a4) and positioned (a5). The operation correlated with wafer alignment is included in the operation of positioning the wafer to be visually checked by combining a single positioning system with a computer, and the operation of the positing system is controlled by software program control of the computer. Then a standard wafer is taken (a6) and a fuse is selected (a8). A user selects a wafer position for required visual check. Then a correlation scale factor for the visual check is provided to the user (a9), and visual check image are acquired.</p> |
