| 摘要 |
PROBLEM TO BE SOLVED: To eliminate difficulty in forming a capacitor with a small size and a high density, by forming a metallic layer serving as an internal electrode of the capacitor on a side wall of a dielectric layer, and forming a metallic layer serving as an external electrode of the capacitor on a layer made of a dielectric material. SOLUTION: A conductive plug 26 is electrically connected to a first area so as to cover the first area in a capacitor. Then, a dispersion blocking layer 27 is formed on the plug 26. Afterwards, a dielectric layer 28a disposed on the plug 26 is stacked on the barrier layer 27. Then, a first metallic layer 29, which is electrically connected to the barrier layer 27 and serves as an internal electrode of the capacitor, is formed on a side wall of the dielectric layer 28a. Further, a dielectric material layer 30, which serves as a dielectric of the capacitor, is formed on an upper part and a side wall of the dielectric layer 28a, and a second metallic layer 31 serving as an external electrode of the capacitor is formed on the dielectric material layer 30. |
