发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which reduces dispersion in flattening by using new design rules and improves product yield. SOLUTION: In a semiconductor device, wherein a projecting part 12 which is necessary for circuit operation, is arranged and formed in irregular distribution in a semiconductor board 11, and a film to be flattened which is embedded at least in a circumference of the projecting part 12 and flattens the entire arrangement surface of the projecting part 12, is formed, a first dummy projection part 13 of a fixed configuration which is unnecessary for circuit operation is arranged periodically in a region, where the distribution of the projecting part 12 is thin and a second dummy projection part 14 of an arbitrary configuration which is unnecessary for circuit operation is arranged in a region, which is not embedded by the arrangement of the first dummy projection part 13.
申请公布号 JP2000114258(A) 申请公布日期 2000.04.21
申请号 JP19980276127 申请日期 1998.09.29
申请人 TOSHIBA CORP 发明人 KOIDO NAOKI;TAKEUCHI YUJI;ARITOME SEIICHI
分类号 H01L21/3205;H01L23/52;(IPC1-7):H01L21/320 主分类号 H01L21/3205
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