SUBSTRATE WITH ITO TRANSPARENT CONDUCTIVE FILM AND LIQUID CRYSTAL DISPLAY ELEMENT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain a substrate with ITO transparent conductive film having both of greater surface ruggedness and low specific resistance by providing a ruggedness forming layer between a transparent substrate and ITO film so that surface ruggedness of the ITO transparent conductive film becomes specified roughness. SOLUTION: ITO transparent conductive film 21 is applied on a transparent substrate 26 consisting of a glass plate 25 and a color filter 24 of R G B formed on the same. This ITO transparent conductive film 21 is a laminated body of a ruggedness forming layer 23 and an ITO layer 22. This laminated body can be obtained by laminating the ITO film 22 on the substrate 26 with the ruggedness forming layer 23 previously film-formed, however, after film-forming the rugged forming layer 23 on the transparent substrate, the ITO film 22 is preferably rapidly laminated without exposing the ruggedness forming layer to air. And in this case the rugged forming layer 23 is provided between the transparent substrate 26 and the ITO film 22 so that surface ruggedness of the ITO film 22 is >=15 nm based on averaged roughness of 10 observed points.