摘要 |
PROBLEM TO BE SOLVED: To possibly reduce the laser output down of a gas laser oscillator and prolong the maintenance period by extending the discharge tube length to increase the distance between a pin-like anode and a total reflection mirror or half-mirror. SOLUTION: The gas laser device has a laser oscillator having a discharge tube 1d extending in a direction X1 or X2 to increase the distance between the top end of a pin-like anode 6b and a total reflection mirror or half-mirror. A high voltage is applied to cause a glow discharge 20, thereby diffusing sputters from the end of a cathode 5b and the top end of the anode 6b. The sputter reflected between the anode 6b and a half-mirror 8 repeats the reflection several times because of a long distance between the anode 6b and the half- mirror 8, and almost deposits to the inner wall of the discharge tube 1d, without reaching the half-mirror 8, thereby reducing the sputter deposited to the half- mirror 8. |