发明名称 WIRE BONDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a wire bonding method with which the bonding time can be shortened without damaging the neck section of the wire by making the locus of a capillary simple and little in the moving amount of the capillary, and a low wire loop having an overall height of 200 μm or smaller can be formed stably by stabilizing the height of the wire loop as a whole. SOLUTION: After a ball formed at the front end of a wire 3 extending from the front end of a capillary 4 is bonded to a first bonding point A, the capillary 4 is raised to a point B and moved to a position C which is obliquely above a point B in the direction of a second bonding point G. The capillary 4 is moved up to a position D which is obliquely above the position C in the direction opposite to the second bonding point G and in recession is moved to a position E obliquely above a position D in the direction of the second bonding point G. Successively, the capillary 4 is lowered, and the wire 3 is bonded to the second bonding point G.
申请公布号 JP2000114304(A) 申请公布日期 2000.04.21
申请号 JP19980286203 申请日期 1998.10.08
申请人 SHINKAWA LTD 发明人 NISHIURA SHINICHI;TAKEUCHI NOBUO
分类号 H01L21/60;B23K20/00 主分类号 H01L21/60
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