| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method which can accurately discriminate abnormal operation of semiconductor manufacturing equipment. SOLUTION: A plurality of data are sampled about at least one parameter, under a condition of normal operation of semiconductor manufacturing equipment 11. On the basis of the sampled data group, Mahalanobis space is formed. On the basis of the Mahalanobis space, the Mahalonobis distance D2 is calculated from the measured value about the parameter obtained by the operating condition of the semiconductor manufacturing equipment 11. When the value of the Mahalanobis distance D2 exceeds a specified value, it is decided that the semiconductor manufacturing equipment 11 has put to abnormal operation.
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