| 摘要 |
PROBLEM TO BE SOLVED: To install a more number of probes than in the existing system, to keep the size of the probe constant, and to improve electrical characteristics by bringing one edge part of the probe into contact with one contact of an element to be measured, and by stopping deformation before the probe reaches an elastic deformation limit. SOLUTION: On an insulation substrate 1, a body 2 of a probe with elasticity is formed. At an edge 3 of the probe, a material with high hardness such as tungsten is jointed, and electric wiring 4 is formed. When needed, thousands of probes or more are formed. In an element 6 to be measured, a contact 5 is formed on the surface. In this case, when a working shelf where the element 6 to be measured is fitted is moved upward or a head plate where the body 2 of the probe is fixed is lowered, and the contact 5 of the element to be measured is brought into contact with the edge of 3 of the probe, the body 2 of the probe is subjected to elastic deformation. After that, when electrical measurement is advanced for completing, the body 2 of the probe is restored to its original shape.
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