| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature controller for uniformly controlling the temperature of an object whose temperature is to be controlled without increasing manufacturing cost or complicating a maintenance check work. SOLUTION: This controller is provided with a rotating body 70 for relatively rotating the axial center of a heat plate 30 and a fluid spraying nozzle 73 for spraying temperature fluid to the heat plate 30 so that flow rate distribution along the radial direction of the heat plate 30 can peak at the outer peripheral pat. The temperature fluid is sprayed so as to be supplied from the fluid spraying nozzle 73 by relatively rotating the rotating body 70 and a waver W.
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