| 摘要 |
PROBLEM TO BE SOLVED: To perform plural parallel pattern exposures and a pattern exposure having a complex shape by shifting optical frequencies of laser beams of one or more laser beams from a beam generating source for plural beams, composing plural laser beams and forming an optical spot while converging the compose beams. SOLUTION: A fixed optical platen 51 has a laser generating source 53 generating plural laser beams L1, L2 and L3, modulation elements 591, 592 and 593 shifting the laser beams respectively and one part of a means composing the laser beams. A moving optical platen 52 moves a converged spot which is generated by converging the composed laser beams with an objective lens 68 with respect to the photoresist layer 12 of a substrate 11. Laser beams emitted from the laser generating source 53 are successively reflected from beam splitters 571, 572 and 573 to become the separated laser beams L1, L2 and L3, Polarized light which are obtained by controlling the modulation elements 591, 592 and 593 with an EOM driver 71 are composed with a polarizing beam splitter 63. |
