| 摘要 |
PROBLEM TO BE SOLVED: To effectively damp sedimentation vibrations (ringing) in the vicinity of read position without using a complicated closed loop control circuit by a method wherein a mechanical damping structure for restricting vibrations of a rotor element is inserted into between a part of a stator element and a part of the rotor element. SOLUTION: An integrated micro-actuator 9' connects a stator element 17' to a fixed bias region 30 where two fixed damping arms 18a", 18b" are biased at the same reference potential as a rotor element 11' via a connection part 25, and the fixed damping arms 18a", 18b" are respectively connected to fixed arms (bias regions) 20a, 20b to bias first and second drive potentials. As the results, a movable arm of the rotor element 11' arranged between the fixed damping arms 18a", 18b" is a movable damping arm 13". The fixed damping arms 18a", 18b" and the movable damping arm 13" structure as a whole a damping structure 32 for sedimentation vibrations of the rotor element 11".
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