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发明名称
Bestimmung der Kohlenstoffdichte in einem Einzelsiliziumkristall durch die FT-IR Methode
摘要
申请公布号
DE69328063(D1)
申请公布日期
2000.04.20
申请号
DE19936028063
申请日期
1993.09.29
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
KITAGAWARA, YUTAKA;KUBOTA, HIROSHI;TAMATSUKA, MASARO
分类号
G01N21/35;(IPC1-7):G01N21/35
主分类号
G01N21/35
代理机构
代理人
主权项
地址
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