Aluminum oxide film, especially for a magnetic storage device magnetic head or an ink jet print head drive mechanism, contains magnesium oxide, lanthanum oxide and/or yttrium oxide

摘要

A novel aluminum oxide film contains 10-30 wt.% magnesium oxide, lanthanum oxide and/or yttrium oxide. Independent claims are also included for the following: (i) production of the above film by physical vapor deposition (PVD) using a deposition source having the above film composition; (ii) a magnetic head with a read gap layer comprising the above film; (iii) production of the above magnetic head; (iv) a magnetic storage device comprising the above magnetic head; and (v) production of the above magnetic storage device.