发明名称 Semiconductor wafer has dividing lines from which is formed semiconductor component
摘要 The wafer has several dividing lines (DXa,b) extending in a first direction with first spacing, and second dividing lines (DYa,b) extending in a second orthogonal direction with a second spacing. The two dividing lines separate a semiconductor component region (CR1,2). The first dividing lines have alternating first and second widths (La,b), with the second width larger than the first one. The second dividing lines have alternating third and fourth widths (La,b), with the fourth width larger than the third one. An Independent claim is included for the semiconductor component.
申请公布号 DE19931886(A1) 申请公布日期 2000.04.20
申请号 DE19991031886 申请日期 1999.07.08
申请人 MITSUBISHI DENKI K.K. 发明人 ISHIMURA, YOUICHI;TAKAHASHI, HIDEKI;ASANO, NORIHISA
分类号 B26F3/00;H01L21/301;H01L21/78;(IPC1-7):H01L21/78 主分类号 B26F3/00
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