发明名称 Plasma generator has conductor fed through vacuum chamber in insulating tube of greater diameter, with tube ends sealed with respect to chamber walls, and conductor ends connected to AC field source
摘要 The arrangement has a conductor (4) fed through the vacuum chamber (3) in a tube (5) of insulating material of greater diameter than the conductor. The tube ends are fixed in and sealed with respect to vacuum chamber walls (6,7). The conductor ends are connected to a source (8,9) for generating an electromagnetic AC field. The rod-shaped conductor forms a coil (2) where it extends into the vacuum chamber with a pitch angle of between 10 and 15 degrees and length approximately equal to one wavelength.
申请公布号 DE19848022(A1) 申请公布日期 2000.04.20
申请号 DE19981048022 申请日期 1998.10.17
申请人 LEYBOLD SYSTEMS GMBH 发明人 LIEHR, MICHAEL
分类号 H05H1/46;(IPC1-7):H05H1/46 主分类号 H05H1/46
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