发明名称 |
Gerät zum Polieren von Wafers |
摘要 |
An apparatus 1 for polishing wafers W comprising a turn table 3 with a polishing pad 2 fixedly extended thereon, at least one polishing head 4 positioned above a point on the turn table 3 spaced by a distance from its center, a plate 7 mounted on a lower surface of the at least one polishing head 4, and a carrier 6, which is used for retaining the wafers W, mounted on the plate 7 in a manner such that the carrier 6 is freely rotatable relative to the plate 7, wherein a backing pad 12 which is used to press the wafers W is fixed on the plate 7 and the wafers W are rotated around their respective centers, while being revolved around the center of the plate 7. According to the apparatus 1, polished wafers W with an excellent flatness are obtained in a reliable manner. <IMAGE> |
申请公布号 |
DE69607123(D1) |
申请公布日期 |
2000.04.20 |
申请号 |
DE1996607123 |
申请日期 |
1996.12.20 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
HASEGAWA, FUMIHIKO;KOBAYASHI, MAKOTO;SUZUKI, FUMIO |
分类号 |
B24B37/04;B24B37/27;B24B37/28;B24B37/30;H01L21/304;(IPC1-7):B24B37/04 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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