发明名称 |
FRONT-ILLUMINATED FLUORESCENT SCREEN FOR UV IMAGING |
摘要 |
In one embodiment of the invention, phosphor powder in a binder (28) is deposited on a flat first side (30) of a fused silica substrate (26). The UV output of a laser beam (14) is reflected off an angled beam splitter (16) so as to be incident upon a flat second side (32) of the fused silica substrate. The phosphor is energized by the UV light transmitted through the fused silica and re-radiates a visible wavelength (41). The binder is selected to be opaque to UV wavelengths so that only a thin layer, 10-20 microns, of the phosphor is energized by the incident UV beam. Since the energized phosphor layer against the first side of the substrate is extremely thin and flat, the energized phosphor produces a visible light which precisely corresponds to the incident UV light. The visible light may then be used to determine the characteristics of the UV beam.
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申请公布号 |
WO0022420(A1) |
申请公布日期 |
2000.04.20 |
申请号 |
WO1999US23322 |
申请日期 |
1999.10.06 |
申请人 |
CYMER, INC.;BUCK, JESSE, D. |
发明人 |
BUCK, JESSE, D. |
分类号 |
G01J1/02;G01J1/42;G01J1/58;G01T1/20;(IPC1-7):G01N21/63 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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