发明名称 FRONT-ILLUMINATED FLUORESCENT SCREEN FOR UV IMAGING
摘要 In one embodiment of the invention, phosphor powder in a binder (28) is deposited on a flat first side (30) of a fused silica substrate (26). The UV output of a laser beam (14) is reflected off an angled beam splitter (16) so as to be incident upon a flat second side (32) of the fused silica substrate. The phosphor is energized by the UV light transmitted through the fused silica and re-radiates a visible wavelength (41). The binder is selected to be opaque to UV wavelengths so that only a thin layer, 10-20 microns, of the phosphor is energized by the incident UV beam. Since the energized phosphor layer against the first side of the substrate is extremely thin and flat, the energized phosphor produces a visible light which precisely corresponds to the incident UV light. The visible light may then be used to determine the characteristics of the UV beam.
申请公布号 WO0022420(A1) 申请公布日期 2000.04.20
申请号 WO1999US23322 申请日期 1999.10.06
申请人 CYMER, INC.;BUCK, JESSE, D. 发明人 BUCK, JESSE, D.
分类号 G01J1/02;G01J1/42;G01J1/58;G01T1/20;(IPC1-7):G01N21/63 主分类号 G01J1/02
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