| 摘要 |
<p>Low defect density, low impurity bulk single crystals of AlN, SiC and AlN:SiC alloy are produced by depositing appropriate vapor species of Al, Si, N, C on multiple nucleation sites that are preferentially cooled to a temperature less than the surrounding surfaces in the crystal growth enclosure. The vapor species may be provided by subliming solid source material, vaporizing liquid Al, Si or Al-Si or injecting source gases. The multiple nucleation sites may be unseeded or seeded with a seed crystal such as 4H or 6H SiC.</p> |
