发明名称 |
Single crystal, especially silicon single crystal, is grown under neck growth conditions of high pulling speed relative to the phase boundary axial temperature gradient |
摘要 |
A single crystal growth process, in which the crystal neck portion is grown at a high ratio of pulling speed to phase boundary axial temperature gradient, is new. A single crystal growth process comprises growing the neck portion under conditions in which the quotient V/G(r) is greater than a constant Ckrit with a value of 1.3/*10<-3> cm<2>/K.min., where V = pulling speed, G(r) = axial temperature gradient at the solid/liquid phase boundary and r = radial distance from the center of the thin neck crystal.
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申请公布号 |
DE19847695(A1) |
申请公布日期 |
2000.04.20 |
申请号 |
DE19981047695 |
申请日期 |
1998.10.15 |
申请人 |
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG |
发明人 |
EHLERT, ANDREAS;DORNBERGER, ERICH;AMMON, WILFRIED VON |
分类号 |
C30B15/20;C30B15/00;C30B15/14;C30B29/06;(IPC1-7):C30B15/20;C30B15/36;C30B13/28 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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