Herstellungsverfahren eines weichmagnetischen Filmes

摘要

This method provides a soft magnetic film having a high saturation magnetic flux density and an anisotropy of high magnetic permeability suitable for the various magnetic head at a high production yield by use of a sputtering apparatus provided with a sputtering electrode, which has permanent magnets 2 arranged above a target 1 with a main ingredient of Fe or Co in such a way that lines of magnetic force 3 generated by said permanent magnets are in parallel to the surface of said target 1 and to the center line of said target 1 and make a magnetic strength symmetric against said center line while the lines of magnetic force at the right side of said center line is being of a reverse direction to that of the left side of said center line.