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发明名称
IMPROVED PROCESS FOR PRODUCING NANOPOROUS SILICA THIN FILMS
摘要
申请公布号
EP0993684(A1)
申请公布日期
2000.04.19
申请号
EP19980920941
申请日期
1998.04.29
申请人
ALLIEDSIGNAL INC.
发明人
SMITH, DOUGLAS, M.;RAMOS, THERESA;RODERICK, KEVIN, H.;WALLACE, STEPHEN
分类号
C01B33/12;C23C18/12;H01L21/314;H01L21/316;(IPC1-7):H01L21/316
主分类号
C01B33/12
代理机构
代理人
主权项
地址
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