SENSOR WITH DIAPHRAGM SENSOR CHIP

摘要

An acceleration sensor with a diaphragm sensor chip (6) has lead frames (3). One of the lead frames (3) has a die pad (4). The sensor chip (6) is flexibly adhered to the die pad (4) by adhesive (10). The sensor chip (6) has a diaphragm (6b). The sensor chip (6) outputs signals in accordance with flexure of the diaphragm (6b). The lead frames (3) are molded by a mold member (2). The mold member (2) define a space (8a) about the sensor chip (6). The coefficient of linear expansion of the mold member (2) is between 1.4x10<-5>/ DEG C and 1.8x10<-5>/ DEG C, and the modulus of elasticity of the mold member (2) is between 100x10<3>kg/cm<2> and 130x10<3>kg/cm<2>. Use of the mold member (2) minimizes the ratio of change of sensitivity due to temperature changes, which improves the temperature characteristics of the sensor.