发明名称 Anti-reflective films, optical elements and reduction-projection exposure apparatus utilizing same
摘要 <p>An optical anti-reflective film includes five layers are laminated on the surface of a substrate, wherein the first, third and fifth layers as counted from the substrate side consist of a low-refractive-index material, the second and fourth layers consist of a high-refractive-index material, and the sum of the optical film-thicknesses of the first, second and third layers is in the range of 0.8 lambda 0 to 1.2 lambda 0 inclusive, and the optical film-thicknesses of the fourth and fifth layers are respectively in the range of 0.2 lambda 0 to 0.3 lambda 0 inclusive, where lambda 0 is a selected wavelength of light with which the film may be used, desirable in the range of 150 to 300 nm. &lt;IMAGE&gt;</p>
申请公布号 EP0994368(A2) 申请公布日期 2000.04.19
申请号 EP19990120415 申请日期 1999.10.13
申请人 NIKON CORPORATION 发明人 SHIRAI, TAKESHI
分类号 G02B1/11;(IPC1-7):G02B1/11 主分类号 G02B1/11
代理机构 代理人
主权项
地址