发明名称 |
Piezoelectric device, ink jet recording head, and methods of manufacturing said device and head |
摘要 |
A piezoelectric device having a crystallized piezoelectric film between a lower and an upper electrode, wherein the crystal axis of the columnar crystal grain with the (001) orientation in the crystal forming the piezoelectric film is inclined by a predetermined angle relative to the normal direction of the lower electrode face, thereby improving the electric/mechanic converting function under low voltage conditions. <IMAGE> |
申请公布号 |
EP0952000(A3) |
申请公布日期 |
2000.04.19 |
申请号 |
EP19990108007 |
申请日期 |
1999.04.22 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
QIU, HONG;SUMI, KOUJI;NISHIWAKI, TSUTOMU;MORIYA, SOUICHI |
分类号 |
B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/16;H01L41/09;H01L41/187;H01L41/22;H01L41/318;H01L41/43 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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