SEMICONDUCTOR MICRO-RESONATOR DEVICE

摘要

An optical, semiconductor micro-resonator device includes a microcavity resonator and a pair of adjacent waveguides. The microcavity resonator may be formed as a disk, a ring or closed loop with arbitrarily curved circumference with a diameter of approximately 56000 lambda lg/res or less where lambda lg is the longest operating wavelength of light and nres is the propagating refractive index. A portion of each of the waveguides is disposed adjacent to the microcavity resonator wherein the adjacent portion may be either tangential to the microcavity resonator or curve about a respective portion of the microcavity resonator. Light propagating in the first waveguide with a wavelength on resonance with the microcavity resonator is coupled thereto via resonant waveguide coupling and from the microcavity resonator the light is coupled to the second waveguide for output therefrom. Light propagating in the first waveguide with a wavelength that is off resonance with the microcavity resonator is not coupled to the microcavity resonator but continues to propagate in the first waveguide for output therefrom. The microcavity resonator and waveguides are formed of semiconductor materials for on-chip integration with other semiconductor devices.