| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment method of arc discharge plasma capable of treating only an objective region on a substrate and complying with an enlarged treatment area with a simple means. SOLUTION: In a method in which gas 2 for discharge and for treatment is supplied between two electrodes 1 to impress DC voltage, a surface treatment is conducted using the plasma with arc discharge generated between electrodes, the surface treatment is conducted by a method in which a plasma generating source is moved for a fixed substrate 3 or a method in which the plasma generating source is fixed and a substrate side is moved. |
