发明名称 |
Piezoelectric device, actuator using the same, and ink-jet recording head |
摘要 |
A piezoelectric device comprises: a lower electrode; a piezoelectric film formed on the lower electrode; and an upper electrode formed on the piezoelectric film, wherein a low dielectric material having a dielectric constant that is lower than the piezoelectric film is formed at grain boundary exposed regions of the piezoelectric film.
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申请公布号 |
US6051914(A) |
申请公布日期 |
2000.04.18 |
申请号 |
US19980018440 |
申请日期 |
1998.02.04 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
NISHIWAKI, TSUTOMU |
分类号 |
B41J2/045;B41J2/055;H01L41/047;H01L41/09;H01L41/22;H02N2/00;(IPC1-7):H01L41/04 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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