发明名称 GRINDING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To stably rotate a grinding head without movement by locating a center of gravity of a band-shaped grinding film supplying means and a center of gravity of a band-shaped grinding film collecting means on a rotation axis of the grinding head. SOLUTION: A grinding film supplying means 9 is capable of feeding a grinding film 8 along an elastic pad 7 which is detachably provided on a grinding surface of a grinding head 4. A grinding film collecting means 10 is capable of winding and collecting the grinding film 8 that the grinding film supplying means 9 supplies to the grinding surface of the grinding head 4. Each center of gravity of both of the grinding film supplying means 9 and the collecting means 10 is arranged so as to be located on a rotation axis 20 of the grinding head 4. As a result, the grinding head 4 is capable of stably rotating without moving, even if the grinding head 4 rotates. Even if each gravity of the grinding film supplying means 9 to the collecting means 10 holding the grinding pad 8 is not the same, the grinding head 4 does not move.</p>
申请公布号 JP2000108004(A) 申请公布日期 2000.04.18
申请号 JP19980285334 申请日期 1998.10.07
申请人 CANON INC 发明人 MIYAZAKI KYOICHI;TAKAHASHI KAZUO
分类号 B24B21/00;B24B37/00;H01L21/304;(IPC1-7):B24B21/00 主分类号 B24B21/00
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