| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide flow-rate detecting device in which an insulating film, a thermosensitive resistor and a protective film are formed sequentially on a substrate, in which a continuity hole is formed in the protective film situated in the terminal region of the thermosensitive resistor, in which an electrode pad is installed in the continuity hole by using stress relaxation and in which the electrode pad and the thermosensitive resistor are connected by increasing their close contact property. SOLUTION: An insulating film 6 is formed on the surface of a substrate 5. An upstream-side resistor, a heater resistor 8 and a downstream-side resistor are arranged and installed in parallel on the insulating film 6. Continuity holes 27 are formed in positions which are situated in terminal regions 13 of the heater resistor 8 out of a protective film 26. A stress relaxation layer 33 is formed between the terminal regions 13 bonded through the continuity holes 27 and electrode pads 30. The terminal regions 13 are pressed to the side of the insulating film 6 so as to be fixed.</p> |
