FLOW RATE SENSOR AND METHOD FOR MANUFACTURING IT

摘要

PROBLEM TO BE SOLVED: To perform heat insulation from a diaphragm to a base and to prevent sensitivity from decreasing or response property from decreasing when the flow rate of fluid is to be measured based on a heat transfer phenomenon. SOLUTION: A flow rate sensor consists of a diaphragm structure part 4 that is made of at least a heat-sensitive resistance part 11 and a support film 2 for supporting the heat-sensitive resistance part 11 and a support base 1 for supporting the lower surface side of the diaphragm structure part 14 around the region of the heat-sensitive resistance part 11. The diaphragm structure part 14 is a region inside a part in contact with the support base 1 and has a thin part 15 where it is thinner than the other parts of the region at least at one portion of a region for surrounding the region of the heat-sensitive resistance part 11. A protection layer 3 should preferably provided at the upper surface side of the diaphragm structure part 14.