| 摘要 |
PROBLEM TO BE SOLVED: To suppress thermal deformation and camber of a cut workpiece by a simple structure by forming a work plate holding the work piece by using a low heat expanding material. SOLUTION: A work plate 42 is formed of a low heat expanding material, that is, an invar alloy, for instance. In the work plate 42 during a cutting, a temperature is raised by heat generation due to the friction of traveling wire and ingot 32. Because heat can not be radiated via a cylinder rod 48 and a work holder 44 like at both the ends, at a center part of the work plate 42, in particular, a temperature becomes high. However, because the work plate 42 is formed by the invar alloy, a substantially fixed shape of the work plate 42 can be kept, even if the temperature of the work plate 42 is raised and deviation is generated in a temperature distribution. As a result, the camber of wafer and an angle error of a cut surface according to thermal deformation of the work plate 42 can be eliminated and cutting accuracy of wafer can be improved. |
