| 摘要 |
PROBLEM TO BE SOLVED: To enhance reliability at a joint by jointing a pressure generating unit composed of a silicon base body and a channel unit composed of a basic material of ceramic without using any adhesive thereby decreasing the process for jointing respective members. SOLUTION: The ceramic member of a channel unit 2 is subjected, on one side thereof, to metallization of thin Au film and eutectic joint to the silicon base body of a pressure generating unit 1 composed of a silicon base body 11 is conducted. Metallization is performed by depositing Au about 1μm on a sufficiently cleaned ceramic member by sputtering. Alternatively, the joint face of the silicon base body 11 subjected to surface reforming may be pressed against the joint face of the second spacer member 22 of the channel unit 2 and jointed thereto through dehydration reaction at about 500 deg.C under reduced pressure. According to the method, the process for jointing respective members can be decreased while enhancing reliability at the joint.
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