DISPLACEMENT-MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a displacement-measuring device that can securely adjust a gap and has a slide protection film with improved electrical and mechanical characteristics. SOLUTION: A capacitance-type encoder is composed, where a scale member 1 and a sensor head 2 are slid and moved relatively. A surface where a transfer electrode 12 of the scale member 1 is formed and that where a transmission/ reception electrode 22 of the sensor head 2 are formed are covered with slide protection films 13 and 23, respectively. The slide protection films 13 and 23 are formed by a coating type insulation film and the lamination film of DLC film according to the plasma CVD.