| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately measure and control parallelism of pressing member for pressing an object and a stage for putting the object. SOLUTION: Provided is a movable stage 102 which is put on a stage 106 for putting an object to be pressed and capable of moving where at least, three coordinates positions on X and Y axes are shown. Also provided is a pressing member 107 which is put on the three points of the movable stage 102 which presses to Z-axis direction of a plurality of load cells 101a, 101b and 101c of which output values varies based on the pressure values when receiving pressure in Z-axis direction. Furthermore provided is a CPU 205 for operating the inclination of the pressing member 107 and the stage 106 based on the coordinates position of the movable stage 102 on X and Y axes position by a coordinates position recognizing means recognizing the coordinates position and the output value of the load cells 101a, 101b and 101c.
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