Composite transport carrier,申请号SG19980000840-传众专利搜索

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发明名称	Composite transport carrier
摘要
申请公布号	SG71783(A1)	申请公布日期	2000.04.18
申请号	SG19980000840	申请日期	1998.04.16
申请人	FLUOROWARE INC.	发明人	BHATT, SANJIV, M.;EGGUM, SHAWN, D.;OLSON, WAYNE, C.
分类号	H01L21/00;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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