| 摘要 |
<p>PROBLEM TO BE SOLVED: To unnecessitate a mechanism taking the bending of a glass substrate into consideration and to prevent the speed of a manufacturing process from being restricted by the bending of the glass substrate by providing a vacuum chuck for sucking and fixing the substrate on an upper surface of a tray for carrying substrate. SOLUTION: On an upper surface of a tray for carrying substrate 1, a vacuum chuck 8 constituted of an air suction hole 3, an air suction passage 4, a valve 5 and a nozzle 6 is provided. A glass substrate 2 is mounted on the upper surface of the tray 1 for carrying substrate, the valve 5 is opened by connecting the nozzle 6 with an air sucking device, air is sucked and the glass substrate 2 is sucked. Next, the valve 5 is closed, the connection of the nozzle 6 is removed and the glass substrate 2 is held on the upper surface of the tray for carrying substrate 1 in a sucking and fixing state. This glass substrate 2 is horizontally carried in a manufacturing process in a state that the glass substrate 2 is sucked and fixed on the upper surface of the tray for carrying substrate 1 and the glass substrate 2 is mounted on each device in the manufacturing process and is processed. At a point of time when all the processings are terminated, the valve 5 is opened, the sucking and fixing are released and the glass substrate 2 is removed from the tray for carrying substrate 1.</p> |
