发明名称 TURBO MOLECULAR PUMP
摘要 PROBLEM TO BE SOLVED: To permit accurate measurement of a volume of thermal expansion of a rotor by performing arithmetic operations of a rotation output based on the number of pulses output through detection made by a non-contact displacement sensor and of a volume of thermal expansion for the area from one end of a rotary shaft to a pulse generator based on a DC electrical potential level of the detection output, and by finding an increase in temperature of the rotor calculated based on the volume of thermal expansion. SOLUTION: A swirl sensor 40 is installed to the upper end of a support cylinder and a pulse disk 41 is provided in the upper end of a rotary shaft 7 within a space 50. A small depression 41a is provided on the underside of this pulse disk 41 along its periphery. Each time the small depression 41a moves past above the swirl sensor 40, a pulse voltage is generated to be used to find the speed. At this time, the reference voltage varies in proportion with the distance between the swirl sensor 40 and the pulse disk 41. The pulse voltage goes through DC conversion as it passes through a low-pass filter and the resultant change in voltage is directly proportional to a change in a volume of thermal expansion. If the coefficient of linear thermal expansion of the rotary shaft 7 and the length of the rotary shaft between the lower end of the rotary shaft 7 and the mounting position of the pulse disk 41 are known, therefore, the increase in temperature of dynamic blades 5 can be obtained from the volume of thermal expansion.
申请公布号 JP2000110778(A) 申请公布日期 2000.04.18
申请号 JP19980280360 申请日期 1998.10.01
申请人 MITSUBISHI HEAVY IND LTD 发明人 TOYAMA KATSUHISA
分类号 F04D27/00;F04D19/04;F16C32/04;(IPC1-7):F04D27/00 主分类号 F04D27/00
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