发明名称 Dual laser system for extended heterodyne interferometry
摘要 The present invention is a laser system (10, 100, 200) employing paired simple lasers (12, 16) or paired Zeeman type lasers (102, 112 or 202, 204). Systems of beambenders (20, 108, 210, 212, 214), half-wave plates (106, 116), and polarizing beamsplitters (22, 104, 114, 118, 216) pair the frequency component of one laser (12, 16, 102, 112, 202, 204) with that of another to produce one or more measurement beams (24, 150, 160, 228, 230) having orthogonally polarized frequency components. Systems of beamsplitters (26, 120, 124, 218, 220) and photodetectors (30, 122, 126, 206, 208) provide reference information about the frequency difference (196, 198) between the respective frequency components in the measurement beams (24, 150, 160, 228, 230). The frequency difference (196, 198) is tunable across a wide range, specifically including 4 MHz to 40 MHz when the lasers (12, 16, 102, 112, 202, 204) are conventional He-Ne types.
申请公布号 US6052186(A) 申请公布日期 2000.04.18
申请号 US19980187434 申请日期 1998.11.05
申请人 EXCEL PRECISION, INC. 发明人 TSAI, JOHN C.
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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