| 摘要 |
PROBLEM TO BE SOLVED: To provide a base board processing device capable of maintaining certain airtightness of a cover with respect to a processing chamber despite its simple configuration. SOLUTION: A base board processing device is equipped with a box-shaped processing chamber 1 having an opening in the over-part, a cover 4 movable between the open position and close position for the opening in the chamber 1, a first sealing member 21 installed in such a way as surrounding the periphery of the opening, a second sealing member 22 installed in such a way as surrounding the first sealing member 21, and a gas exhausting mechanism to evacuate the closed space bounded by the chamber oversurface, cover undersurface, and the first 21 and second sealing members 22.
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