| 摘要 |
PURPOSE: A gas analyzing pipe system and an analysis method thereof are provided to measure various contaminants at one time, to conveniently move an analysis equipment and to prevent contamination of a sample pipe and to stabilize an analysis equipment by branching many pipes from a single sample pipe. CONSTITUTION: A gas supply pipe(10) is connected to one end of a sample pipe(20) via a connector(12). An on/off switch(14) is attached near the connector. Branch pipes(16) are extended from a first branch point(18) near the connector. A stabilizing branch pipe(22) is extended from a second branch point(19) in front of the first branch point. Analysis equipments(50) are connected to the respective branch pipes. Upon continuously supplying N2 gas into the gas supply pipe, contamination degree of the gas supply pipe is degraded. After stabilization of the gas analysis equipments, a gas to be analyzed is supplied into the gas supply pipe. Then, impurities in the gas are analyzed. N2 gas is supplied via the stabilizing branch pipe to sustain the analysis equipments in a stable state. The connector of the sample pipe is connected to a supply pipe for a third gas to be analyzed. Then, impurities in the third gas are analyzed. With the gas analyzing pipe system, various impurities are simultaneously analyzed via plural branch pipes.
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