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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100251134(B1)
申请公布日期
2000.04.15
申请号
KR19950047289
申请日期
1995.12.07
申请人
KOKUSA ELECTRIC CO.,LTD.
发明人
HARADA, TORU
分类号
C23C8/28;H01L21/31;H01L21/316;(IPC1-7):H01L21/316
主分类号
C23C8/28
代理机构
代理人
主权项
地址
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