CHEMICAL SUPPLY SYSTEM FOR SEMICONDUCTOR DEVICE FABRICATION

摘要

PURPOSE: A chemical supplying system for a semiconductor device is provided to maintain the quality of product uniformly, to reduce both the area and the cost for installation and to simplify both the maintenance and the repair for system. CONSTITUTION: A chemical supply system comprises: a storage vessel(19) where a chemical mixed solution mixed with a standard mixing ratio; a supply pump(21) connected to the storage vessel; and a supply tank(20) which is supplied with the mixed solution from the storage vessel by the supply pump and supplies the desired amount of the mixed solution to a process bath(23) where a process is proceeded. A filter(22) is installed in the middle of the supply pump and the supply tank, and impurities of the chemicals supplied to the supply tank by the supply pump is removed through the filter.