INSPECTION METHOD OF WAFER INSERTION

摘要

PURPOSE: An apparatus for testing wafer insertion and its method are provided to automatically test a bad insertion of a wafer received in a cassette which receives a number of wafers in parallel. CONSTITUTION: The apparatus for testing wafer insertion of a cassette receiving a number of wafers in parallel include a camera for picking up the image of the cassette having wafers, a vision system for dividing the cassette image picked up into a number of test windows according to the storage area of each wafer, and a bad insertion determination unit for obtaining a slope of a wafer image in each test window with respect to a direction extended of each test window and thus determining the mal-insertion of the wafer on the basis of the slope of the wafer image.