REACTION CHAMBER FOR SEMICONDUCTOR DEVICE SUPPLIED WITH GUIDE FOR ALIGNMENT

摘要

PURPOSE: A reaction chamber is provided to present the convenience for assembling the chamber. CONSTITUTION: A reaction chamber(200) is disclosed. The chamber(200) comprises a pair of plate located parallel and composing top and bottom of the chamber and chamber ring located between the plates forming body part of the chamber. In the chamber is at least a pair of align guide(100). The location of the guide(180) can be decided by the standardization of assembling work to the chamber(200). The align guide(180) can be supplied in the shape of thrust formed on the bottom plane of the chamber. The distance of isolation may be decided by the diameter of chamber ring. The work for assembling and equipment could be done easily.