SURFACE TREATMENT UNIT USING PLASMA HAVING SPECIMEN AS POSITIVE ELECTRODE

摘要

PURPOSE: A surface treatment unit using plasma having a specimen as a positive electrode is provided to prevent the surface treatment efficiency to be lowered due to the polymer film deposited on the electrode. CONSTITUTION: A surface treatment unit comprises: a chamber; a vacuum pump for providing a vacuum to the chamber; a vacuum measuring unit for measuring a vacuum of the chamber; and a voltage supplying unit for supplying a voltage; a gas injecting unit for injecting a reactant gas into the chamber. A first specimen is established in the chamber and is grounded to the ground terminal and a second specimen is established in the chamber and is electrically connected to the voltage supplying unit through a control part and is positively or negatively biased by an alternating part electrically connected with the voltage supplying unit. Thus, the invention does not need an additional electrode, thereby excluding an influence of contaminant deposited on the electrode. Also, the physical properties of the deposited polymer film can be improved.